Large Clean Oven
Large-capacity Clean Oven for Large-sized Specimens or Mass Treatment of Specimens
Miniaturization of electronic components has increased the demand for clean heat treatment environments. To give an example, while dust was not previously a problem, it has recently begun to significantly affect the reliability of miniaturized electronic components. In the production of semiconductors, even jigs used in the production process are subject to cleanliness requirements.
Lab Companion's 1500L Large Clean Oven is the answer to these requirements. Not only can it heat-treat mass amounts of specimens at once, it also conforms to the increasing requirements of "heat treatment in a clean environment."
Large capacity clean ovens are also in demand due to the necessity of reducing semiconductor manufacturing costs. For example, increasing the wafer size to 300 mm from 200 mm makes the surface area 2.25 times larger, which produces almost twice as many chips. The annealing time is the same regardless of size, so the production volume will double?this can only be accomplished with a large-sized oven.
- Supporting large-volume and large-sized specimens
- In order to support mass heat treatment of specimens, as well as drying and annealing of wafer jigs, quartz tubes, and other items that are getting larger, the inside dimensions have been expanded for this model. The upright configuration takes up the minimum necessary installation space.
(Equivalent to FED-STD-209D class 100) / Uniform heat treatment
|Maximum voltage||AC200V 3φ3W 50/60Hz|
|Maximum power consumption||9.0kVA|
|Performance||Temperature range||(Ambient temperature +60) to +200°C|
|Temperature uniformity||±3.0°C at +100°C|
|Temperature heat-up time||+100°C from ambient temperature within 60 min.|
Class 5 (equivalent to FED-STD-209D class 100) at stable temperature
(Cleanliness Class 100 cannot be maintained while door is open)
* Performance values are obtained at an ambient temperature of 20°C with no specimen in circulation operation mode.
* The model no. is current as of today and is subject to change without notice after order.